Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821451 | Dry etching method, microfabrication process and dry etching mask | — | 2004-11-23 |
| 6768596 | Click-stop mechanism provided between two relatively slidable members | Hiroaki Suzuki, Kazuhiro Ikuta | 2004-07-27 |
| 6689283 | Dry etching method, microfabrication process and dry etching mask | Kenji Uchiyama | 2004-02-10 |