Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6753437 | CVD material compound and method for manufacturing the same, and CVD method of iridium or iridium compound thin film | Jun-ichi Taniuchi | 2004-06-22 |
| 6743934 | Raw material compounds for use in CVD, and chemical vapor deposition of ruthenium compound thin films | Masayuki Saito | 2004-06-01 |