Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811662 | Sputtering apparatus and manufacturing method of metal layer/metal compound layer by using thereof | — | 2004-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811662 | Sputtering apparatus and manufacturing method of metal layer/metal compound layer by using thereof | — | 2004-11-02 |