FK

Francis Ko

Lam Research: 1 patents #55 of 153Top 40%
Overall (2004): #223,846 of 270,089Top 85%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6799907 Plasma enhanced method for increasing silicon-containing photoresist selectivity Sandy Chen, Charlie Lee 2004-10-05