Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780731 | HDP gap-filling process for structures with extra step at side-wall | Yeur-Luen Tu, Tsung-Hsun Huang, Yuan-Hung Liu | 2004-08-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780731 | HDP gap-filling process for structures with extra step at side-wall | Yeur-Luen Tu, Tsung-Hsun Huang, Yuan-Hung Liu | 2004-08-24 |