Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767844 | Plasma chamber equipped with temperature-controlled focus ring and method of operating | — | 2004-07-27 |
CH
Chuan-Chieh Huang
Overall (2004): #247,622 of 270,089Top 95%
1
Patents 2004