Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830877 | Method for forming via and contact holes with deep UV photoresist | Tsung-Chuan Chen, Shew-Tsu Hsu | 2004-12-14 |
| 6764810 | Method for dual-damascene formation using a via plug | Tsung-Chuan Chen, Chun-Liang Fan | 2004-07-20 |