Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830504 | Barrier-slurry-free copper CMP process | Yi-Chen Chen, Ray-Ting Chang | 2004-12-14 |
| 6756309 | Feed forward process control method for adjusting metal line Rs | Chii-Ping Chen, Wen-Chen Chien | 2004-06-29 |