Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6721939 | Electron beam shot linearity monitoring | Wen-Chuan Wang, Tyng-Hao Hsu | 2004-04-13 |
| 6713365 | Methods for filling shallow trench isolations having high aspect ratios | Lee-Jen Chen | 2004-03-30 |
| 6677231 | Method for increasing adhesion ability of dielectric material in semiconductor | Cheng-Yuan Tsai, Ming-Sheng Yang | 2004-01-13 |