Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6693047 | Method for recycling semiconductor wafers having carbon doped low-k dielectric layers | Wen-Pin Chang, Syun-Ming Jeng | 2004-02-17 |
CL
Chih-Cheng Lu
Overall (2004): #246,435 of 270,089Top 95%
1
Patents 2004