Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787781 | Arc chamber filament for ion implanter | Hom-Chung Lin, Mei-Lan Hung, Shin-Ho Tzeng | 2004-09-07 |
| 6767407 | Auto-centering device for mechanical clamp | Song Lin, Hom-Chung Lin, Zuo-Chang Yen | 2004-07-27 |
| 6737663 | Apparatus and method for detecting tilt angle of a wafer platform | Hom-Chung Lin, Song Lin, Hu SUN, Wu-Han Jiang | 2004-05-18 |