Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6768079 | Susceptor with built-in plasma generation electrode and manufacturing method therefor | — | 2004-07-27 |
| 6730276 | Plastic film electrostatic adsorption apparatus and electrostatic adsorption method | Kazunori Ishimura, Teruyasu Fujita | 2004-05-04 |