Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6799888 | Method for predicting temperature, test wafer for use in temperature prediction, and method for evaluating lamp heating system | Satoshi Shibata | 2004-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6799888 | Method for predicting temperature, test wafer for use in temperature prediction, and method for evaluating lamp heating system | Satoshi Shibata | 2004-10-05 |