Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750976 | Device for manufacturing semiconductor device and method of manufacturing the same | — | 2004-06-15 |
| 6734069 | Method of forming a high dielectric constant insulating film and method of producing semiconductor device using the same | — | 2004-05-11 |
| 6734451 | Aggregate of semiconductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same | Masafumi Kubota, Masaaki Niwa, Noboru Nomura | 2004-05-11 |
| 6727108 | APPARATUS AND METHOD FOR OPTICAL EVALUATION, APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF CONTROLLING APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE | Takayuki Yamada, Masanori Okuyama | 2004-04-27 |
| 6720790 | Method and apparatus for evaluating insulating film | Yukiko Hashimoto, Akio Watakabe | 2004-04-13 |
| 6695947 | Device for manufacturing semiconductor device and method of manufacturing the same | — | 2004-02-24 |