Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689627 | Process for manufacturing micromechanical components in a semiconductor material wafer with reduction in the starting wafer thickness | Marta Mottura, Marco Ferrera, Bernardino Zerbini, Mauro Bombonati | 2004-02-10 |