Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830631 | Method for the removing of adsorbed molecules from a chamber | Zsolt Nenyei, Wilfried Lerch, Thomas Graf | 2004-12-14 |
| 6809011 | Adjusting of defect profiles in crystal or crystalline-like structures | Wilfried Lerch | 2004-10-26 |