Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806206 | Etching method and etching liquid | Masaki Munakata, Hirohito Komatsu, Kazuma Teramoto, Nobuhiro Goda, Masakazu Motoi +3 more | 2004-10-19 |
| 6673516 | Coating composition for chemically amplified positive resist and method of patterning resist using the same | Kazufumi Sato | 2004-01-06 |