Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787457 | Method of etching and anti-reflection film using substituted hydrocarbon with halogen gas | Shusaku Yanagawa, Kenichi Kubo, Youichi Goto | 2004-09-07 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787457 | Method of etching and anti-reflection film using substituted hydrocarbon with halogen gas | Shusaku Yanagawa, Kenichi Kubo, Youichi Goto | 2004-09-07 |