Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836139 | Method and apparatus for determining defect and impurity concentration in semiconducting material of a semiconductor wafer | — | 2004-12-28 |
| 6803780 | Sample chuck with compound construction | Michael J. Adams, William J. Alexander, III | 2004-10-12 |
| 6788076 | Apparatus for determining doping concentration of a semiconductor wafer | — | 2004-09-07 |
| 6771092 | Non-contact mobile charge measurement with leakage band-bending and dipole correction | Min-Su Fung, Roger L. Verkuil, Gregory S. Horner | 2004-08-03 |
| 6741093 | Method of determining one or more properties of a semiconductor wafer | Robert J. Hillard | 2004-05-25 |