Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734100 | Method of forming ruthenium thin film using plasma enhanced process | Jung-Hwan Choi, Young Ki Han | 2004-05-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734100 | Method of forming ruthenium thin film using plasma enhanced process | Jung-Hwan Choi, Young Ki Han | 2004-05-11 |