Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818522 | Method for forming capacitor of semiconductor device with RuTiN and RuTiO diffusion barrier | — | 2004-11-16 |
| 6764899 | Method for fabricating semiconductor device | — | 2004-07-20 |
| 6706627 | Method of manufacturing capacitor with a diffusion barrier containing ruthenium, titanium and nitrogen | — | 2004-03-16 |