Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814825 | Method and device for controlling thickness during spin coating | Wolfgang Becker, Edgar Rueth, Eggo Sichmann | 2004-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6814825 | Method and device for controlling thickness during spin coating | Wolfgang Becker, Edgar Rueth, Eggo Sichmann | 2004-11-09 |