Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6784075 | Method of forming shallow trench isolation with silicon oxynitride barrier film | Tzu-Kun Ku | 2004-08-31 |
| 6727160 | Method of forming a shallow trench isolation structure | Fung-Hsu Cheng, Jui-Ping Li | 2004-04-27 |
| 6720235 | Method of forming shallow trench isolation in a semiconductor substrate | Tzu-Kun Ku | 2004-04-13 |