Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809015 | Method for heat treatment of silicon wafers and silicon wafer | Shoji Akiyama, Yuuichi Matsumoto, Masaro Tamatsuka | 2004-10-26 |
| 6805743 | Method for manufacturing single-crystal-silicon wafers | Masaro Tamatsuka, Takatoshi Nagoya | 2004-10-19 |
| 6806199 | Method for manufacturing silicon mirror wafer, silicon mirror wafer, and heat treatment furnace | Shoji Akiyama | 2004-10-19 |