Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6769966 | Workpiece holder for polishing, polishing apparatus and polishing method | Kouichi Okamura, Noboru Tamai, Kouzi Morita | 2004-08-03 |
| 6729941 | Process for manufacturing semiconductor wafer and semiconductor wafer | Junichi Ueno, Hiromasa Hashimoto | 2004-05-04 |