TF

Tomoyoshi Furihata

SC Shin-Etsu Chemical Co.: 2 patents #56 of 264Top 25%
Overall (2004): #37,331 of 270,089Top 15%
2
Patents 2004

Issued Patents 2004

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6790581 Hybrid compound, resist, and patterning process Hideto Kato 2004-09-14
6773858 Positive photoresist composition Hideto Kato, Kyoko Soga 2004-08-10