Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815352 | Silicon focus ring and method for producing the same | Makoto Kawai, Keiichi Goto | 2004-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815352 | Silicon focus ring and method for producing the same | Makoto Kawai, Keiichi Goto | 2004-11-09 |