KT

Kazuhiko Tomaru

SC Shin-Etsu Chemical Co.: 1 patents #128 of 264Top 50%
Overall (2004): #180,089 of 270,089Top 70%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6760214 Electrostatic chuck for ion injector Ryuichi Handa, Tsutomu Yoneyama 2004-07-06