Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6776879 | Backing plate used for sputtering apparatus and sputtering method | Tatsushi Yamamoto | 2004-08-17 |
| 6753496 | Plasma processing apparatus | Tatsushi Yamamoto, Masaki Hirayama, Tadahiro Ohmi | 2004-06-22 |
| 6726802 | Plasma processing apparatus | Tatsushi Yamamoto, Masaki Hirayama, Tadahiro Ohmi | 2004-04-27 |