Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6807974 | Single wafer type substrate cleaning method and apparatus | Yuji Ono | 2004-10-26 |
| 6792959 | Single wafer type cleaning method and apparatus | Yuji Ono | 2004-09-21 |
| 6763839 | Substrate cleaning system | Yuji Ono, Hiroshi Yamaguchi, Miyuki Takaishi, Hideo Kamikochi | 2004-07-20 |
| 6752877 | Single wafer type cleaning method and apparatus | Yuji Ono | 2004-06-22 |