Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6812082 | Semiconductor device and manufacturing method thereof | Yoshiharu Hirakata, Shunpei Yamazaki | 2004-11-02 |
| 6706648 | APCVD method of forming silicon oxide using an organic silane, oxidizing agent, and catalyst-formed hydrogen radical | Shunpei Yamazaki, Mitsunori Sakama | 2004-03-16 |
| 6703264 | Method of manufacturing a semiconductor device | Shunpei Yamazaki, Mitsunori Sakama | 2004-03-09 |