Issued Patents 2004
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818568 | Method of using beam homogenizer and laser irradiation apparatus | — | 2004-11-16 |
| 6809012 | Method of making a thin film transistor using laser annealing | Shunpei Yamazaki, Satoshi Murakami, Hideto Ohnuma, Osamu Nakamura, Yasuyuki Arai | 2004-10-26 |
| 6808969 | Laser irradiation method and laser irradiation apparatus, and method for fabricating semiconductor device | Shunpei Yamazaki | 2004-10-26 |
| 6790930 | Process for producing polyimide resin | Takeshi Kikuchi, Hiroyuki Tsuji, Koji Okada, Hiroyuki Furutani, Shoji Hara +1 more | 2004-09-14 |
| 6787755 | Laser illumination apparatus | Shunpei Yamazaki | 2004-09-07 |
| 6784030 | Laser illumination system | Shunpei Yamazaki | 2004-08-31 |
| 6767799 | Laser beam irradiation method | Akihisa Shimomura, Kenji Kasahara, Aiko Shiga, Hidekazu Miyairi, Koji Dairiki | 2004-07-27 |
| 6764886 | Manufacturing method of semiconductor device | Shunpei Yamazaki, Akihisa Shimomura, Hisashi Ohtani, Masaaki Hiroki, Aiko Shiga +2 more | 2004-07-20 |
| 6765175 | Laser irradiation apparatus, laser irradiation method, and manufacturing method for a semiconductor device | Tomoaki Moriwaka | 2004-07-20 |
| 6753212 | Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device | Shunpei Yamazaki, Hisashi Ohtani, Kenji Kasahara, Ritsuko Kawasaki | 2004-06-22 |
| 6750423 | Laser irradiation method, laser irradiation apparatus, and method of manufacturing a semiconductor device | Tomoaki Moriwaka | 2004-06-15 |
| 6750424 | Beam homogenizer, laser irradiation apparatus, laser irradiation method, and method of manufacturing semiconductor device | — | 2004-06-15 |
| 6744008 | Laser apparatus and laser annealing method | Kenji Kasahara, Ritsuko Kawasaki, Hisashi Ohtani | 2004-06-01 |
| 6741276 | Camera control system | Hiroki Yonezawa | 2004-05-25 |
| 6734446 | Apparatus and method for doping | Shunpei Yamazaki, Toshiji Hamatani | 2004-05-11 |
| 6730550 | Laser apparatus, laser annealing method, and manufacturing method of a semiconductor device | Shunpei Yamazaki, Hisashi Ohtani, Kenji Kasahara, Ritsuko Kawasaki | 2004-05-04 |
| 6728039 | Laser optical apparatus | — | 2004-04-27 |
| 6716283 | Optical processing apparatus and optical processing method | Naoaki Yamaguchi, Satoshi Teramoto | 2004-04-06 |
| 6707614 | Laser irradiation stage, laser irradiation optical system, laser irradiation apparatus, laser irradiation method, and method of manufacturing a semiconductor device | — | 2004-03-16 |
| 6706570 | Laser illumination system | Shunpei Yamazaki | 2004-03-16 |
| 6700096 | LASER APPARATUS, LASER IRRADIATION METHOD, MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE, PRODUCTION SYSTEM FOR SEMICONDUCTOR DEVICE USING THE LASER APPARATUS, AND ELECTRONIC EQUIPMENT | Shunpei Yamazaki, Hisashi Ohtani, Masaaki Hiroki, Aiko Shiga, Mai Akiba | 2004-03-02 |
| 6693257 | Laser irradiation apparatus, laser irradiation method, and method for manufacturing a semiconductor device | — | 2004-02-17 |
| 6693162 | Polyimide resin and resin composition, adhesive solution, film-state joining component,and adhesive laminate film improved in moisture resistance using it, and production methods therefor | Hiroyuki Tsuji, Hiroyuki Furutani, Takeshi Kikuchi | 2004-02-17 |
| 6689651 | Laser processing method | Hongyong Zhang | 2004-02-10 |