Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815054 | Ultra-thin, corrosion resistant, hydrogenated carbon overcoats by combined sputtering and PECVD | Wen-Hong Liu, Taesun Kim, Chung Shih | 2004-11-09 |
| 6749729 | Method and apparatus for workpiece biassing utilizing non-arcing bias rail | Weilu Xu, Sam Vi Luong | 2004-06-15 |