Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733590 | Method and apparatus for multilayer deposition utilizing a common beam source | Paul Stephen McLeod | 2004-05-11 |
| 6689425 | Nitrogen-doped hydrogenated carbon films by ion beam deposition | Xiaoding Ma, Kevin J. Grannen, Jing Gui, Jeffrey A. McCann | 2004-02-10 |