Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6729561 | Cleaning nozzle and substrate cleaning apparatus | Sadao Hirae, Masanobu Sato | 2004-05-04 |
| 6705331 | Substrate cleaning apparatus | Masanobu Sato, Sadao Hirae, Kenya Morinishi | 2004-03-16 |