Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6724609 | Electrostatic sensing chuck using area matched electrodes | Hoi-Cheong Steve Sun, Nitin V. Desai, William R. Roach, Timothy Allen Pletcher, David Keller +3 more | 2004-04-20 |