Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808952 | Process for fabricating a microelectromechanical structure | Jeffry J. Sniegowski, Thomas W. Krygowski, Scott D. Habermehl, Dale L. Hetherington, James E. Stevens +2 more | 2004-10-26 |