Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805810 | Method & apparatus for monitoring plasma processing operations | Michael Lane Smith, Jr., Pamela Denise Peardon Ward | 2004-10-19 |
| 6769288 | Method and assembly for detecting a leak in a plasma system | Pamela Peardon Denise Ward, Michael Lane Smith, Jr. | 2004-08-03 |