Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815350 | Method for forming a thin film using an atomic layer deposition (ALD) process | Yong-Woo Hyung, Man-Sung Kang, Jae Young Ahn | 2004-11-09 |
| 6740977 | Insulating layers in semiconductor devices having a multi-layer nanolaminate structure of SiNx thin film and BN thin film and methods for forming the same | Jae Young Ahn, Yong-Woo Hyung, Man-Sug Kang | 2004-05-25 |