Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797109 | Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates | Jeong-hyuck Park, Hee-duk Kim, Jung-hun Cho, Jong-wook Choi, Sung-bum Cho +6 more | 2004-09-28 |