Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746972 | Apparatus for and method of heat-treating a wafer | Choung Hyep Kim, Sung-Il Jang, Ki Hyon Chyun, Hee Sun Chab | 2004-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6746972 | Apparatus for and method of heat-treating a wafer | Choung Hyep Kim, Sung-Il Jang, Ki Hyon Chyun, Hee Sun Chab | 2004-06-08 |