Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834440 | Wafer spin drying apparatus with a plurality of supply nozzles and methods for using the same | — | 2004-12-28 |
| 6802911 | Method for cleaning damaged layers and polymer residue from semiconductor device | Yong-Sun Ko, In-Seak Hwang | 2004-10-12 |
| 6717231 | Trench isolation regions having recess-inhibiting layers therein that protect against overetching | Sung-Eui Kim, In-Seak Hwang, Young-sun Koh, Dong-Ho Ahn, Moon-han Park +1 more | 2004-04-06 |
| 6699773 | Shallow trench isolation type semiconductor device and method of forming the same | Young Min Kwon, Chang-Lyoung Song, In-Seak Hwang | 2004-03-02 |