Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6769973 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jae-Phil Boo, Jong Soo Kim, Sang-Seon Lee, Sun-Wung Lee | 2004-08-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6769973 | Polishing head of chemical mechanical polishing apparatus and polishing method using the same | Jae-Phil Boo, Jong Soo Kim, Sang-Seon Lee, Sun-Wung Lee | 2004-08-03 |