Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6754942 | Method for assembling a polishing head and apparatus for detecting air leakage in the polishing head while assembling the same | Jung-Hwan Sung, Yong-Seok Ro, Doeg-Jung Kim | 2004-06-29 |
| 6695680 | Polishing pad conditioner for semiconductor polishing apparatus and method of monitoring the same | Jae Hoon Choi | 2004-02-24 |