Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819490 | Homogenization of a spatially coherent radiation beam and printing and inspection, respectively, of a pattern on a workpiece | Torbjorn Sandstrom, Kenneth Wilhelmsson | 2004-11-16 |
| 6700095 | Pattern generation system using a spatial light modulator | Torbjorn Sandstrom, Ulric Lungblad, Dag Hanstorp | 2004-03-02 |