Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818990 | Fluorine diffusion barriers for fluorinated dielectrics in integrated circuits | Toh-Ming Lu, Atul Kumar | 2004-11-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818990 | Fluorine diffusion barriers for fluorinated dielectrics in integrated circuits | Toh-Ming Lu, Atul Kumar | 2004-11-16 |