Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825118 | Method of manufacturing semiconductor device having trench element-isolating structure | Takahiro Maruyama | 2004-11-30 |
| 6740598 | Wiring layer dry etching method and semiconductor device manufacturing method | Kenji Kawai, Atsunori Nishiura | 2004-05-25 |