Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833331 | Method of manufacturing semiconductor integrated circuit device having insulating film formed from liquid substance containing polymer of silicon, oxygen, and hydrogen | Masayoshi Saito, Masayoshi Hirasawa, Masayuki Kojima, Hiroyuki Uchiyama, Hiroyuki Maruyama +1 more | 2004-12-21 |
| 6693008 | Method of manufacturing a semiconductor integrated circuit device and a semiconductor integrated circuit device | Hidenori Sato, Norio Suzuki, Akira Takamatsu, Hiroyuki Maruyama, Takeshi Saikawa +1 more | 2004-02-17 |