Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734600 | Component for forming vertically standing waves of a wavelength | Juha Ellä | 2004-05-11 |
| 6734770 | Microrelay | Sven Michaelis, Florian Plötz | 2004-05-11 |
| 6724058 | Method for producing a filled recess in a material layer, and an integrated circuit configuration produced by the method | Klaus-Gunter Oppermann | 2004-04-20 |