Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806006 | Integrated cooling substrate for extreme ultraviolet reticle | Michael Lercel | 2004-10-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806006 | Integrated cooling substrate for extreme ultraviolet reticle | Michael Lercel | 2004-10-19 |